Electronic theory of the cylindrical magnetron sciencedirect. Download fulltext pdf decorative titanium nitride coloured coatings on bellmetal by reactive cylindrical magnetron sputtering article pdf available january 2010 with 1,702 reads. Planar magnetrons are more popular than the cylindrical magnetrons because it is easier. Report hull cut off equation electron motion in cylindrical magnetron please fill this form, we will try to respond as soon as possible. Pdf decorative titanium nitride coloured coatings on. Cylindrical magnetron sputtering system download pdf info publication number us5178743a. The device consists of two copper cylinders with 1. The magnetron structure is supposed to contain a cylindrical cathode of radius surrounded by a coaxial cylindrical anode of radius with a constant magnetic field in.
Pdf cylindrical magnetron sputtering system for coating. On tomonagas theory of splitanode magnetrons springerlink. In search for the limits of rotating cylindrical magnetron. Cylindrical magnetron technical literature to view technical literature listed below click on the pdf icon or the title of the file. Us4179351a cylindrical magnetron sputtering source. Here you can download the free lecture notes of microwave engineering pdf notes mwe notes pdf materials with multiple file links to download. Cylindrical magnetron angstrom science cylindrical. Pdf hull cut off equation electron motion in cylindrical. Cylindrical magnetron sputtering system for coating solar selective surfaces onto batches of tubes article pdf available in journal of vacuum science and technology 166. In search for the limits of rotating cylindrical magnetron sputtering w. Us5178743a cylindrical magnetron sputtering system. Microwave engineering pdf notes mwe notes pdf smartzworld. Angstrom sciences has developed cylindrical magnetron technology that embody. Robust mechanical and electrical construction corrosion resistant and modular magnet bars optimized magnetics to maximize bulk target erosion and deposited film uniformity profiled magnetics to reduce the separation distance between adjacent racetracks vapor phase efficiency.
A cylindrical magnetron capable of running at high current and voltage levels with a target tube that is self cleaning not only in the center portion, but also at the ends. Pdf a rotating cylindrical magnetron consists of a cylindrical tube, functioning as the cathode, which rotates around a stationary magnet assembly. Us7014741b2 cylindrical magnetron with self cleaning. Pdf the operation of any magnetron type sputtering system is based on using of anomalous glow discharge in a crossed b e.
A dc cylindrical magnetron sputtering device is designed and its characteristics are studied. Pdf the axial profile of plasma characteristics of cylindrical. Embodiments of the present invention employ a cylindrical hollow cathode magnetron sputtering system, which causes the overall film deposition system to be ideally suited for coating elongate cylindrical substrates such as wires and fibers and the like. Pdf influence of the planar cylindrical target erosion. Now, angstrom sciences has created a compact, lightweight, and economical cylindrical magnetron specifically designed to offer these same advantages to flat panel display, solar cell, and web coating. Influence of the planar cylindrical target erosion zone of magnetron sputtering on the uniformity of a thinfilm coating. Pdf design and fabrication of a dc cylindrical magnetron. Description download hull cut off equation electron motion in cylindrical magnetron comments. For the different physical vapor deposition techniques, magnetron sputtering is clearly used extensively in the.
Magnetron sputtering sources can be defined as diode devices in which magnetic fields are used in concert with the cathode surface to form electron traps which. Cylindrical magnetrons have long been trusted in the glass coating industry to create uniform thin films while maximizing target utilization. Angstrom sciences has created a compact, economical cylindrical magnetron specifically designed to offer cylindrical sputtering advantages to flat panel display, solar cell, and web coating applications. Performance data to view an performance data pdf listed below click on the pdf icon or the title of the file. Us20040163943a1 cylindrical magnetron with self cleaning. Placement of cylindrical magnets inside of a cylindrical cathode comprising a source of depositing material for sputter depositing of the material upon the interior surface of a substantially cylindrical workpiece, results in improved deposition rates, low power requirements, low workpiece temperatures and purity and cohesiveness in the deposited layer of material. With a rotating cylindrical magnetron, this compound layer is sputtered.
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